Chemical etching-assisted femtosecond laser multi-beam rapid preparation of As2Se3 microlens arrays
Wenke Wang, Dongfeng Qi, Panke Lei, Wei Shi, Zhanzhu Li, Jianguo Zhang, Weihua Ho, Hongyu Zheng
Topics & Concepts
MicrolensMaterials scienceFemtosecondChalcogenideOpticsLaserOptoelectronicsInfraredEtching (microfabrication)Chalcogenide glassIsotropic etchingLens (geology)NanotechnologyLayer (electronics)PhysicsPhase-change materials and chalcogenidesLaser Material Processing TechniquesNonlinear Optical Materials Studies