Oxidation of thermoelectric Bi2Te3-based alloys by atomic layer deposition of Ru metal
Seunghyeok Lee, Minji Lee, Gwang Min Park, Seung‐Hyub Baek, Heesuk Kim, Jin-Sang Kim, Tae Joo Park, Seong Keun Kim
Topics & Concepts
Atomic layer depositionMaterials scienceThermoelectric effectMetalLayer (electronics)Chemical engineeringDeposition (geology)Thermoelectric materialsMetallurgyOxidation processGrain sizeNanotechnologyComposite materialThermal conductivityThermodynamicsPhysicsSedimentEngineeringBiologyPaleontologyAdvanced Thermoelectric Materials and DevicesGas Sensing Nanomaterials and SensorsThermal properties of materials