Insight into the mechanism of low friction and wear during the chemical mechanical polishing process of diamond: A reactive molecular dynamics simulation
Song Yuan, Xiaoguang Guo, Junxin Huang, Yonjun Gou, Zhuji Jin, Renke Kang, Dongming Guo
Topics & Concepts
PolishingAbrasiveDiamondChemical-mechanical planarizationMaterials scienceMolecular dynamicsMachiningMechanism (biology)Substrate (aquarium)SlurryFlow (mathematics)Composite materialMetallurgyMechanicsChemistryComputational chemistryGeologyPhysicsPhilosophyEpistemologyOceanographyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications