Theoretical analysis and comparative study of assorted diaphragm primarily based Micro Electro Mechanical System (MEMS) optical pressure sensors
Thiagarajan Sripriya, Albert Anitha Juliette
Topics & Concepts
Diaphragm (acoustics)Microelectromechanical systemsPiezoresistive effectPressure sensorDisplacement (psychology)Capacitive sensingMaterials scienceAcousticsWork (physics)LinearityMechanical engineeringOptoelectronicsElectronic engineeringVibrationElectrical engineeringEngineeringPhysicsPsychotherapistPsychologyAdvanced MEMS and NEMS TechnologiesAdvanced Fiber Optic SensorsMechanical and Optical Resonators