A combination of library search and Levenberg-Marquardt algorithm in optical scatterometry
Chunfu Guo, Yating Shi, Huaxi Wu, Yabo Xiang, Weiqi Li, Chuanwei Zhang, Shiyuan Liu
Topics & Concepts
Levenberg–Marquardt algorithmAlgorithmJacobian matrix and determinantComputer scienceArtificial neural networkMathematicsArtificial intelligenceApplied mathematicsOptical Coatings and GratingsPhotonic and Optical DevicesAdvanced Fiber Optic Sensors