Electrochemical corrosion behavior and theoretical simulation of cobalt in chemical mechanical polishing process
Bo Ye, Guofeng Pan, Xueli Yang, Yuhang Qi, Qi Fang, Liunan She, Yingqi Di
Topics & Concepts
Chemical-mechanical planarizationPolishingDissolutionCorrosionSlurryMaterials scienceElectrochemistrySurface roughnessCobaltAdsorptionChemical engineeringCorrosion inhibitorEthylenediamineInorganic chemistryMetallurgyChemistryComposite materialElectrodeOrganic chemistryPhysical chemistryEngineeringAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization TechniquesAdvanced materials and composites