Aerosol deposited BaTiO3 film based interdigital capacitor and squared spiral capacitor for humidity sensing application
Alok Kumar, Cong Wang, Fan‐Yi Meng, Jun‐Ge Liang, Bingfang Xie, Zhongliang Zhou, Meng Zhao, Nam‐Young Kim
Topics & Concepts
Materials scienceElectric fieldCapacitorCapacitive sensingRelative humidityHumidityOptoelectronicsCapacitanceSensitivity (control systems)Composite materialElectrical engineeringVoltageElectrodeMeteorologyElectronic engineeringEngineeringPhysical chemistryPhysicsQuantum mechanicsChemistryGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsAcoustic Wave Resonator Technologies