Effect of oxygen and hydrogen flow ratio on indium tin oxide films in rear-junction silicon heterojunction solar cells
Depeng Qiu, Weiyuan Duan, Andreas Lambertz, Karsten Bittkau, Kaifu Qiu, Uwe Rau, Kaining Ding
Topics & Concepts
Materials scienceSputteringIndium tin oxidePassivationHydrogenHeterojunctionSolar cellSiliconOxygenEnergy conversion efficiencyIndiumEtching (microfabrication)OptoelectronicsAnalytical Chemistry (journal)Layer (electronics)Thin filmNanotechnologyChemistryOrganic chemistryChromatographySilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesPhotovoltaic System Optimization Techniques