Enhanced discharge and surface properties of TiSiCN coatings deposited by pulse-enhanced vacuum arc evaporation
Yinghe Ma, Jianguo Yang, Xiubo Tian, Chunzhi Gong, Wenjian Zheng, Yanming He, Huaxin Li, Zengliang Gao, Kexin Zhang, Lianfeng Wei, Paul K. Chu
Topics & Concepts
Materials scienceMicrostructureScanning electron microscopeEvaporationX-ray photoelectron spectroscopyCoatingVacuum arcVacuum chamberElectron beam physical vapor depositionSubstrate (aquarium)NanoindentationOpticsPulsed DCElectric arcVacuum evaporationComposite materialAnalytical Chemistry (journal)PlasmaThin filmSputteringNanotechnologySputter depositionElectrodeChemical engineeringQuantum mechanicsOceanographyPhysical chemistryChromatographyChemistryEngineeringThermodynamicsGeologyPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites