Effect of oxygen flow on the optical properties of hafnium oxide thin films by dual-ion beam sputtering deposition
Shaobo Fang, Chong Ma, Weiming Liu, Junbo He, Cheng Wang, Gang Chen, Dingquan Liu, Rongjun Zhang
Topics & Concepts
Thin filmSputteringMaterials scienceAnalytical Chemistry (journal)HafniumSurface roughnessIon beamRefractive indexFocused ion beamChemistryIonComposite materialOptoelectronicsZirconiumNanotechnologyMetallurgyOrganic chemistryChromatographySemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure AnalysisFerroelectric and Negative Capacitance Devices