Measurement system for wide-range flow evaluation and thermal characterization of MEMS-based thermoresistive flow-rate sensors
N. A. Djuzhev, Vladimir T. Ryabov, Gleb D. Demin, M. A. Makhiboroda, Ilya D. Evsikov, Mikhail M. Pozdnyakov, В. А. Беспалов
Topics & Concepts
ThermistorMaterials scienceMicroelectromechanical systemsVolumetric flow rateFlow measurementThermal mass flow meterFlow (mathematics)Joule heatingTemperature measurementResistorVoltageAcousticsMechanicsElectrical engineeringOptoelectronicsComposite materialThermodynamicsMass flow meterPhysicsEngineeringAdvanced Sensor Technologies ResearchAdvanced MEMS and NEMS TechnologiesElectrical and Thermal Properties of Materials