Fabrication of black aluminium thin films by magnetron sputtering
Joris More-Chevalier, Michal Novotný, Petr Hruška, Ladislav Fekete, Přemysl Fitl, J. Bulı́ř, Petr Pokorný, Lenka Volfová, Š. Havlová, Martin Vondráček, J. Lančok
Abstract
concentration of ∼6%, the Al film growth process favoured the formation of a moth-eye-like antireflective surface. This surface morphology, which was similar to the structure of a cauliflower, is known to trap incident light, resulting in films with a very low reflectivity. A diffuse reflectivity lower than 4% was reached in the ultraviolet-visible-near infrared (UV-VIS-NIR) spectral range that corresponds to a value observed for an ultrahigh absorber. We found that for the preparation of black aluminium, the nitrogen content plays an important role in film formation and the resulting film morphology.