Effects of pH and H2O2 on the chemical mechanical polishing of titanium alloys
Changbang Deng, Liang Jiang, Na Qin, Linmao Qian
Topics & Concepts
PolishingMaterials scienceTitaniumSurface roughnessOxideChemical-mechanical planarizationLayer (electronics)Substrate (aquarium)Titanium oxideSurface finishMetallurgyTitanium alloyChemical engineeringComposite materialAlloyEngineeringOceanographyGeologyAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics