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Recent advances and future developments in PVA brush scrubbing cleaning: A review

Shihao Zhang, Fangyuan Wang, Baimei Tan, Wei Li, Baohong Gao, Yangang He

2022Materials Science in Semiconductor Processing26 citationsDOI

Topics & Concepts

Data scrubbingBrushProcess (computing)Process engineeringFlexibility (engineering)NanotechnologyComputer scienceMaterials scienceManufacturing engineeringWaste managementEngineeringMechanical engineeringStatisticsMathematicsOperating systemAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devices
Recent advances and future developments in PVA brush scrubbing cleaning: A review | Litcius