Deep learning-driven digital inverse lithography technology for DMD-based maskless projection lithography
Jingtao Chen, Yuan-Yuan Zhao, Xu Guo, Xuan‐Ming Duan
Topics & Concepts
Maskless lithographyLithographyComputational lithographyNext-generation lithographyProjection (relational algebra)Materials scienceX-ray lithographyNanotechnologyComputer scienceOptoelectronicsElectron-beam lithographyResistLayer (electronics)AlgorithmAdvancements in Photolithography TechniquesNanofabrication and Lithography TechniquesImage Processing Techniques and Applications