Femtosecond laser micromachining in combination with ICP etching for 4H–SiC pressure sensor membranes
Lukang Wang, You Zhao, You Zhao, Zixuan Yang, Yulong Zhao, Yulong Zhao, Xinwan Yang, Taobo Gong, Cun Li
Topics & Concepts
Materials scienceFemtosecondLaserSurface micromachiningEtching (microfabrication)FluenceSurface roughnessMembraneInductively coupled plasmaOpticsOptoelectronicsRaman spectroscopyPlasmaFabricationNanotechnologyComposite materialLayer (electronics)BiologyPhysicsMedicineGeneticsPathologyAlternative medicineQuantum mechanicsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesSilicon Carbide Semiconductor Technologies