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Influence of atomic incident kinetic energy on crystalline quality of epitaxial GaN thin films: A molecular dynamics study

Rui Li, Gai Wu, Kang Liang, Lianghao Xue, Shizhao Wang, Sheng Liu

2022Materials Science in Semiconductor Processing21 citationsDOI

Topics & Concepts

Materials scienceEpitaxyNucleationDislocationThin filmKinetic energyAtomic unitsOptoelectronicsMolecular dynamicsSurface energyStress (linguistics)Chemical physicsCrystallographyNanotechnologyComposite materialComputational chemistryThermodynamicsChemistryLayer (electronics)PhysicsLinguisticsQuantum mechanicsPhilosophyGaN-based semiconductor devices and materialsZnO doping and propertiesMetal and Thin Film Mechanics
Influence of atomic incident kinetic energy on crystalline quality of epitaxial GaN thin films: A molecular dynamics study | Litcius