Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design
Sungil Yun, Matthew Tom, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides
Topics & Concepts
Computational fluid dynamicsEtching (microfabrication)Multiscale modelingMaterials scienceThermalMechanical engineeringLayer (electronics)Plasma etchingProcess (computing)NanotechnologyComputer scienceMechanicsNuclear engineeringEngineeringChemistryPhysicsThermodynamicsComputational chemistryOperating systemSemiconductor materials and devicesCatalytic Processes in Materials SciencePlasma Diagnostics and Applications