Novel ceria/graphene oxide composite abrasives for chemical mechanical polishing
Chuandong Chen, Yanying Cui, Xiaopei Li, Sida Shen, Wuping Liao, Hongpeng You
Topics & Concepts
Materials scienceChemical-mechanical planarizationPolishingAbrasiveWaferComposite numberOxideGrapheneSurface roughnessNanomaterialsComposite materialLayer (electronics)NanoparticleChemical engineeringNanotechnologyMetallurgyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites