Modification mechanism of collaborative ions implanted into 4H-SiC by atomic simulation and experiment
Qiang Kang, Xudong Fang, Chen Wu, Hao Sun, Bian Tian, Libo Zhao, Songli Wang, Zhuangde Jiang, Nan Zhu, Ryutaro Maeda, Meiju Zhang, Yuanjie Lv
Topics & Concepts
Materials scienceIon implantationMachiningIonResidual stressMolecular dynamicsBrittlenessAnnealing (glass)Ultimate tensile strengthComposite materialMetallurgyChemistryComputational chemistryOrganic chemistryAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research