Bi-layer in-situ phosphorus doped poly-Si films by PECVD for blistering-free high-efficiency industrial TOPCon solar cells
Shuai Ma, Baochen Liao, Đặng Xuân Dự, Don Ding, Chao Gao, Zhengping Li, Qi Wang, Xinyuan Wu, Shuai Zou, Xiaodong Su, Reuben J. Yeo, Xiaopeng Li, W.M. Li, Xiangyan Kong, Wenzhong Shen
Topics & Concepts
Layer (electronics)In situDopingMaterials sciencePlasma-enhanced chemical vapor depositionSolar cellOptoelectronicsChemistrySiliconNanotechnologyOrganic chemistrySilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence