Tailoring annealing duration of gallium oxide film deposited by electron beam evaporation
A. Muhammad, S.S. Ng, Hock Jin Quah, Momin S.M. Abutawahina
Topics & Concepts
Materials scienceAnnealing (glass)Electron beam physical vapor depositionGallium oxideGalliumOxideCathode rayEvaporationElectronMetallurgyNanotechnologyEngineering physicsThin filmEngineeringQuantum mechanicsPhysicsThermodynamicsGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials