Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
Lowie Henderick, Hamid Hamed, Felix Mattelaer, Matthias M. Minjauw, Mikko Nisula, Johan Meersschaut, Jolien Dendooven, Mohammadhosein Safari, Philippe M. Vereecken, Christophe Detavernier
Topics & Concepts
CoatingMaterials scienceNitrogenInorganic chemistryPhosphateDopingAtomic layer depositionTitaniumCobaltChemistryChemical engineeringLayer (electronics)NanotechnologyMetallurgyOptoelectronicsOrganic chemistryEngineeringAdvancements in Battery MaterialsSemiconductor materials and devicesMXene and MAX Phase Materials