Improving machinability of single-crystal silicon by cold plasma jet
Xin Liu, Bingqi Wang, Yuheng Li, Yuyang Zhou, Jiahao Zhang, Ziheng Wang, Jingcan Yan, Xiaolei Gu, Zizhen Yuan, Yang Chen, Shuaishuai Wang, Jiyu Liu
Topics & Concepts
Materials scienceSiliconMachinabilityDiamond turningNanoindentationMonocrystalline siliconComposite materialOptoelectronicsMachiningDiamondMetallurgyDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesMetal and Thin Film Mechanics