Effect of sputtering power on structure and properties of ZTO films
Shijin Yu, Wanmei Xu, Hua Zhu, Wangren Qiu, Qiuyun Fu, Ling Bing Kong
Topics & Concepts
SputteringMaterials scienceWurtzite crystal structureThin filmElectrical resistivity and conductivitySputter depositionFigure of meritBand gapSubstrate (aquarium)TransmittanceGrain sizeSurface roughnessOptoelectronicsAnalytical Chemistry (journal)Composite materialZincMetallurgyNanotechnologyChemistryGeologyOceanographyEngineeringChromatographyElectrical engineeringZnO doping and propertiesGas Sensing Nanomaterials and SensorsTransition Metal Oxide Nanomaterials