Magnetron sputtering issues concerning growth of magnetic films: a technical approach to background, solutions, and outlook
Ali Kosari Mehr, Abbas Kosari Mehr
Topics & Concepts
SputteringHigh-power impulse magnetron sputteringSputter depositionPlasmaMaterials scienceThin filmOptoelectronicsNanotechnologyPhysicsNuclear physicsZnO doping and propertiesMetal and Thin Film MechanicsPlasma Diagnostics and Applications