Piezoelectric-Thermal Coupling Driven Biomimetic Stick–Slip Bidirectional Rotary Actuator for Nanomanipulation
Zhichao Ma, Junming Xiong, Jiakai Li, Hongwei Zhao, Luquan Ren
Abstract
Substantial improvement of rotation driving accuracy is urgently needed and facing challenges. Miniature bidirectional rotary actuators with high-precision and controllable fallback rate require novel driving principles. Here, on the basis of a proposed biomimetic stick-slip motion principle, a novel piezoelectric-thermal coupling bidirectional rotary actuator was developed. The integrated mantis grasping leglike biomimetic claws and heating rods could realize the clockwise macroscopic rotation and anticlockwise macroscopic fallback of a cylindrical rotator, generated by piezoelectric stick-slip and thermal expansion, respectively. The rotation fallback was effectively inhibited at relatively lower frequencies and higher voltages, as a slight fallback rate of 0.095 was confirmed in term of 0.5 Hz and 80 V. An extraordinary piezoelectric-driven macroscopic rotation resolution of 0.2 μrad and thermal-induced microscopic resolution of 0.00073°/°C were experimentally revealed with the aid of real-time observation of the clockwise slow sticking and anticlockwise instantaneous slipping processes by using three-dimensional optical imaging.