Innovative multiscale simulation with experimental validation of ultrafast laser processing in silicon carbide (4H-SiC)
Jianguo Zhao, X. H. Han, Fang Dong, Sheng Liu
Topics & Concepts
Materials scienceSilicon carbideLaserUltrashort pulseCarbideMaterials processingSiliconEngineering physicsNuclear engineeringOptoelectronicsComposite materialProcess engineeringOpticsEngineeringPhysicsAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesIntegrated Circuits and Semiconductor Failure Analysis