Design and simulation of a novel MEMS-based single proof mass three-axis piezo-capacitive accelerometer
Salar Ghasemi, Behzad Sotoudeh, Mehdi Pazhooh
Topics & Concepts
Proof massAccelerometerMicroelectromechanical systemsCapacitive sensingProof of conceptAcousticsElectrical engineeringComputer scienceElectronic engineeringMaterials scienceEngineeringPhysicsOptoelectronicsOperating systemAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesAdvanced Fiber Optic Sensors