A review on effect of various high-k dielectric materials on the performance of FinFET device
J Naveen Ananda Kumar, Shilpi Birla, Garima Agarwal
Topics & Concepts
Materials scienceOptoelectronicsTransistorDrain-induced barrier loweringPolycrystalline siliconSiliconHigh-κ dielectricSubthreshold conductionCMOSField-effect transistorMOSFETGate oxideEngineering physicsGate dielectricShort-channel effectDielectricElectrical engineeringNanotechnologyThin-film transistorEngineeringVoltageLayer (electronics)Semiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignFerroelectric and Negative Capacitance Devices