Study on the process parameters of UV photocatalytic chemical mechanical polishing for single-crystal AlN
Huilong Li, Jiahui Yang, Da Hu, Jiajian Sun, Da Hu, Qiusheng Yan
Topics & Concepts
PolishingPhotocatalysisChemical-mechanical planarizationSingle crystalMaterials scienceProcess (computing)Crystal (programming language)Chemical engineeringOptoelectronicsNanotechnologyChemistryMetallurgyCrystallographyCatalysisComputer scienceEngineeringProgramming languageOperating systemBiochemistryAdvanced ceramic materials synthesisZnO doping and propertiesElectronic and Structural Properties of Oxides