Impact of hydrogen on the boron-oxygen-related lifetime degradation and regeneration kinetics in crystalline silicon
Lailah Helmich, Dominic Walter, R. Falster, V. V. Voronkov, Jan Schmidt
Topics & Concepts
HydrogenSiliconWaferMaterials scienceOxygenBoronCrystalline siliconAnalytical Chemistry (journal)ChemistryChemical engineeringNanotechnologyOptoelectronicsOrganic chemistryEngineeringSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSemiconductor materials and interfaces