High-fidelity fabrication of plasmonic nanoholes array via ion-beam planarization for extraordinary transmission applications
Qing Liu, Yiang Song, Pei Zeng, Chen Zhang, Yiqin Chen, Hanbing Wang, Yi Luo, Huigao Duan
Topics & Concepts
Materials scienceChemical-mechanical planarizationPlasmonFabricationElectron-beam lithographyFocused ion beamLithographyNanotechnologyOptoelectronicsResistIonLayer (electronics)ChemistryOrganic chemistryPathologyMedicineAlternative medicinePlasmonic and Surface Plasmon ResearchGold and Silver Nanoparticles Synthesis and ApplicationsMetamaterials and Metasurfaces Applications