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Fabrication of ultra-thin laser induced graphene electrodes over negative photoresist on glass for various electronic applications

Sangam Srikanth, U S Jayapiriya, Satish Kumar Dubey, Arshad Javed, Sanket Goel

2022Microelectronic Engineering10 citationsDOI

Topics & Concepts

PhotoresistMaterials scienceMicroelectronicsGrapheneLaser ablationElectrical conductorFabricationOptoelectronicsLaserNanotechnologyElectrodeThin filmSemiconductorMicroelectromechanical systemsResistConductivityComposite materialOpticsChemistryLayer (electronics)Alternative medicineMedicinePathologyPhysical chemistryPhysicsSurface Roughness and Optical MeasurementsLaser Material Processing TechniquesDiamond and Carbon-based Materials Research
Fabrication of ultra-thin laser induced graphene electrodes over negative photoresist on glass for various electronic applications | Litcius