Phase tailoring of Ta films via buffer layer-thicknesses controlling
Jiandong Zuo, Y.Q. Wang, Kai Wu, Jinyu Zhang, Gang Liu, Jun Sun
Topics & Concepts
Materials scienceBuffer (optical fiber)Layer (electronics)Phase (matter)CrystallizationDeposition (geology)Composite materialChemical engineeringComputer scienceTelecommunicationsBiologyEngineeringPaleontologyOrganic chemistryChemistrySedimentMetal and Thin Film MechanicsCopper Interconnects and ReliabilityAdvanced materials and composites