Effects of crystal planes on topography evolution of silicon surface during nanoscratch-induced selective etching
Lei Wu, Peng Chen, Liang Deng, Pei Zhang, Bingjun Yu, Linmao Qian
Topics & Concepts
HillockMaterials scienceEtching (microfabrication)WaferTetramethylammonium hydroxideAmmonium hydroxideSiliconCrystal (programming language)Hydrofluoric acidPotassium hydroxideComposite materialDiamondDry etchingNanotechnologyMineralogyChemical engineeringOptoelectronicsMetallurgyLayer (electronics)ChemistryEngineeringComputer scienceProgramming languageAdvanced Surface Polishing TechniquesForce Microscopy Techniques and ApplicationsDiamond and Carbon-based Materials Research