Investigation of the hydrophilic nature and surface energy changes of HfO2 thin films prepared by atomic layer deposition
Sangyoon Lee, Hwi Yoon, Sang-Hun Lee, Seung‐min Chung, Hyungjun Kim
Topics & Concepts
WettingMaterials scienceContact angleThin filmSurface energyAtomic layer depositionChemical engineeringSurface roughnessAnnealing (glass)MicrocrystallineCoatingSurface finishDeposition (geology)Composite materialNanotechnologyCrystallographyChemistryEngineeringSedimentPaleontologyBiologySemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesElectronic and Structural Properties of Oxides