Grating interferometer: The dominant positioning strategy in atomic and close-to-atomic scale manufacturing
Can Cui, Xinghui Li, Xiaohao Wang
Topics & Concepts
Atomic unitsInterferometryGratingScale (ratio)OpticsMaterials sciencePhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesAdvanced Measurement and Metrology TechniquesSurface Roughness and Optical Measurements