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Direct metal bonding using nanotwinned Ag films with (1 1 1) surface orientation under air atmosphere for heterogeneous integration

Leh-Ping Chang, Jianjie Wang, Tzu‐Heng Hung, Kuan‐Neng Chen, Fan-Yi Ouyang

2021Applied Surface Science32 citationsDOI

Topics & Concepts

Materials scienceDirect bondingBonding strengthAnodic bondingOxideAtmosphere (unit)Thermal diffusivityMetalComposite materialMetallurgyLayer (electronics)SiliconThermodynamicsPhysicsQuantum mechanics3D IC and TSV technologiesElectronic Packaging and Soldering TechnologiesCopper Interconnects and Reliability
Direct metal bonding using nanotwinned Ag films with (1 1 1) surface orientation under air atmosphere for heterogeneous integration | Litcius