Effect of the additives on controlling ceria-brush chemical bonding during post-CMP cleaning
Samrina Sahir, Kwang-Min Han, Sanjay Bisht, Tae‐Gon Kim, Jin-Goo Park
Topics & Concepts
BrushMaterials scienceChemical engineeringCleaning agentChemistryNanotechnologyMetallurgyComposite materialOrganic chemistryEngineeringAdvanced Surface Polishing TechniquesBone Tissue Engineering MaterialsAdvanced materials and composites