Molecular understanding of the effect of hydrogen on graphene growth by plasma-enhanced chemical vapor deposition
Shiwen Wu, Dezhao Huang, Haoliang Yu, Siyu Tian, Arif Malik, Tengfei Luo, Guoping Xiong
Abstract
, the quality of obtained graphene, which is indicated by the number of hexagonal carbon rings formed in the graphene sheets). Moreover, increasing the content of hydrogen in the precursors is shown to reduce the growth rate of carbon clusters, and prevent the formation of curved carbon structures during the growth process. The findings provide a detailed understanding of the fundamental mechanisms regarding the effects of hydrogen on the growth of graphene in a PECVD process.
Topics & Concepts
GraphenePlasma-enhanced chemical vapor depositionChemical vapor depositionMaterials scienceHydrogenCarbon fibersChemical engineeringPlasmaNanotechnologyChemical physicsChemistryOrganic chemistryComposite numberComposite materialEngineeringQuantum mechanicsPhysicsGraphene research and applicationsDiamond and Carbon-based Materials ResearchGraphene and Nanomaterials Applications