Room temperature bonding of GaN and diamond substrates via atomic layer
Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Yusuke Shirayanagi, Shuichi Hiza, Kunihiko Nishimura, Eiji Higurashi
Topics & Concepts
Materials scienceDiamondSputteringLayer (electronics)OptoelectronicsEtching (microfabrication)Amorphous solidSubstrate (aquarium)Sputter depositionNanotechnologyComposite materialThin filmCrystallographyChemistryOceanographyGeologyGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsSemiconductor materials and devices