Litcius/Paper detail

Multiphoton 3D lithography

Edvinas Skliutas, Greta Merkininkaitė, Shoji Maruo, Wenxin Zhang, Wenyuan Chen, Weiting Deng, Julia R. Greer, Georg von Freymann, Mangirdas Malinauskas

2025Nature Reviews Methods Primers49 citationsDOI

Topics & Concepts

LithographyMaterials scienceMaskless lithographyComputer scienceNanotechnologyOptoelectronicsElectron-beam lithographyResistLayer (electronics)Nonlinear Optical Materials StudiesNanofabrication and Lithography TechniquesAdvanced Fluorescence Microscopy Techniques