Thickness-dependent ferroelectric properties of HfO2/ZrO2 nanolaminates using atomic layer deposition
Yonghong Chen, Lu Wang, Leyang Liu, Lin Tang, Xi Yuan, Haiyan Chen, Kechao Zhou, Dou Zhang
Topics & Concepts
Materials scienceFerroelectricityAtomic layer depositionPolarization (electrochemistry)Deposition (geology)Layer (electronics)Composite materialSurface roughnessDielectricOptoelectronicsChemistryPhysical chemistrySedimentBiologyPaleontologyFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesFerroelectric and Piezoelectric Materials