Transparent piezoelectric thin-film devices: Pb(Zr, Ti)O3 thin films on glass substrates
Kazuki Ueda, Sang‐Hyo Kweon, Hirotaka Hida, Yoshiharu Mukouyama, Isaku Kanno
Topics & Concepts
Materials scienceThin filmPiezoelectric coefficientUnimorphPiezoelectricityComposite materialSputteringSputter depositionDielectricFerroelectricityOptoelectronicsNanotechnologyAdvanced Sensor and Energy Harvesting MaterialsFerroelectric and Piezoelectric MaterialsAcoustic Wave Resonator Technologies