Control of the preferential orientation and properties of HiPIMS and DCMS deposited chromium coating based on bias voltage
Xiaoyun Ding, Menghui Cui, Yong Lian, Jinchao Jiao, Jinghan Yang, Jin Zhang, Yawen Wu, Xiubo Tian, Chunzhi Gong
Topics & Concepts
High-power impulse magnetron sputteringCoatingChromiumMaterials scienceBiasingOrientation (vector space)VoltageChemical engineeringMetallurgyNanotechnologySputteringThin filmSputter depositionElectrical engineeringMathematicsEngineeringGeometryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchCorrosion Behavior and Inhibition