Preparation of boron-doped diamond-like carbon films via enhanced-PECVD using an additional cathode
Elver Juan de Dios Mitma Pillaca, Rebeca F.B. de O. Correia, Gislene Valdete Martins, Saulo Ribeiro Ferreira, Tiago Fiorini da Silva, C. L. Rodrigues, V.J. Trava-Airoldi
Topics & Concepts
Materials scienceBoronPlasma-enhanced chemical vapor depositionX-ray photoelectron spectroscopyRaman spectroscopyDiamond-like carbonMicrostructureCarbon fibersChemical vapor depositionSiliconChemical engineeringAnalytical Chemistry (journal)Composite materialThin filmNanotechnologyMetallurgyComposite numberChemistryEngineeringOpticsChromatographyPhysicsOrganic chemistryDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives