Machining performance and material removal mechanism of sapphire with novel polishing slurry
Yongchao Xu, Cheng Peng, Youji Zhan, Qianting Wang
Topics & Concepts
PolishingSlurrySapphireMachiningMaterials scienceChemical-mechanical planarizationMetallurgyComposite materialOpticsLaserPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced Machining and Optimization Techniques