Microstructure, properties and applications of Zr-carbide, Zr-nitride and Zr-carbonitride coatings: a review
Anwar Ul‐Hamid
Abstract
Series of XRD spectra obtained for ZrN<sub>x</sub>films produced with RF DC magnetron sputtering with various nitrogen flux levels.
Topics & Concepts
Materials scienceCarbideMicrostructureNitrideMetallurgyZirconium nitrideZirconium carbideComposite materialTitanium nitrideLayer (electronics)Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices