Effect of substrate bias on the microstructure and properties of (AlCrSiNbZr)Nx high entropy nitride thin film
Jianjie Wang, Shou-Yi Chang, Fan-Yi Ouyang
Topics & Concepts
Materials scienceCrystallinityThin filmSubstrate (aquarium)MicrostructureBiasingElectrical resistivity and conductivityAnalytical Chemistry (journal)Amorphous solidSputter depositionSputteringNitrideComposite materialCrystallographyNanotechnologyLayer (electronics)ChemistryElectrical engineeringVoltageChromatographyGeologyEngineeringOceanographyMetal and Thin Film MechanicsHigh Entropy Alloys StudiesDiamond and Carbon-based Materials Research